IEC 62047-21:2014

Title

Language: EN Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

Language: FR Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 21: Méthode d'essai relative au coefficient de Poisson des matériaux MEMS en couche mince

Abstract

Language: EN IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.

Language(s)
Language: EN Language: FR
Edition
1.0
Date of issue
19.06.2014
TC 47/SC 47F
ICS Codes
31.080.99
Publication number
62047
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