IEC 60204-33:2009

Title

Language: EN Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment

Language: FR Sécurité des machines - Equipement électrique des machines - Partie 33: Exigences pour les équipements de fabrication des semi-conducteurs

Abstract

Language: EN IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

Language(s)
Language: EN Language: FR
Edition
1.0
Date of issue
10.12.2009
TC 44
ICS Codes
13.110, 25.040.30, 29.020
Publication number
60204
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Mandatory Standard according current regulation Mandatory Standard according current regulation

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