IEC 62047-3:2006

Title

Language: EN Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing

Language: FR Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 3: Eprouvette d'essai normalisée en couche mince pour l'essai de traction

Abstract

Language: EN Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices. It is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy, when the measured tensile strengths of the standard test pieces, whose tensile strength is pre-determined, are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces.

Language(s)
Language: EN Language: FR
Edition
1.0
Date of issue
15.08.2006
TC 47/SC 47F
ICS Codes
31.080.99
Publication number
62047
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Mandatory Standard according current regulation Mandatory Standard according current regulation

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