IEC 62047-28:2017

Title

Language: EN Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices

Abstract

Language: EN IEC 62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application. This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1 000 μm are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.  

Language(s)
Language: EN
Edition
1.0
Date of issue
20.01.2017
TC 47/SC 47F
ICS Codes
31.080.99
Publication number
62047
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